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Date
1998Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-002004058Publication status
publishedExternal links
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Contributors
Examiner: Baltes, Heinrich P.
Publisher
Hartung-Gorre VerlagSubject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); EIGENSCHAFTEN DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); PROPERTIES OF THIN LAYERS (PHYSICS OF MOLECULAR SYSTEMS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)Organisational unit
03263 - Baltes, Henry
Notes
Diss. Naturwiss. ETH Zürich, Nr. 12743, 1998. Ref.: Henry Baltes ; Korref.: Oliver Paul ; Korref.: Pasqualina M. Sarro.More
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ETH Bibliography
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